ELECTRONIC TECHNOLOGIES
cod. 1002550

Academic year 2009/10
1° year of course - First semester
Professor
Academic discipline
Elettronica (ING-INF/01)
Field
A scelta dello studente
Type of training activity
Student's choice
48 hours
of face-to-face activities
6 credits
hub:
course unit
in - - -

Learning objectives

The course provides the main notions about the manufacturing technologies for VLSI integrated circuits.

Prerequisites

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Course unit content

<p><br />
-Preparation of Si wafers. <br />
-Generalities about planar silicon processing. <br />
-Photolithography. <br />
-Oxidation. <br />
-Doping by diffusion or by ion implantation. <br />
-Chemical vapor deposition, epitaxial growth. <br />
-Wet and dry etching. <br />
-Interconnects and metallizations. <br />
-Packaging problems. <br />
-Technology and principles of operation of some compound semiconductor devices. <br />
</p>

Full programme

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Bibliography

S.M. SZE: ' VLSI Technology ', McGraw-Hill, 1988<br />G. SONCINI: ' Tecnologie Microelettroniche ', Boringhieri, 1986

Teaching methods

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Assessment methods and criteria

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Other information

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