Learning objectives
The course provides the main notions about the manufacturing technologies for VLSI integrated circuits.
Prerequisites
- - -
Course unit content
<p><br />
-Preparation of Si wafers. <br />
-Generalities about planar silicon processing. <br />
-Photolithography. <br />
-Oxidation. <br />
-Doping by diffusion or by ion implantation. <br />
-Chemical vapor deposition, epitaxial growth. <br />
-Wet and dry etching. <br />
-Interconnects and metallizations. <br />
-Packaging problems. <br />
-Technology and principles of operation of some compound semiconductor devices. <br />
</p>
Full programme
- - -
Bibliography
S.M. SZE: ' VLSI Technology ', McGraw-Hill, 1988<br />G. SONCINI: ' Tecnologie Microelettroniche ', Boringhieri, 1986
Teaching methods
<br />
Assessment methods and criteria
- - -
Other information
- - -