Learning objectives
1.KNOLEDGE AND UNDERSTANDING. The first goal of this course is to provide students the knowledge of the main technological steps to manufacture electronic and optoelectronic devices to be used in different applications, and, at the same time, to give them the tools for understanding the most of electronic processes, with special attention to the effects of the technological choices on the final device performance, mainly focusing on:
• the analysis of the limits of technology and of their impact on the final performance of electronic devices;
• the concepts of scaling and integration and the related issues;
• the study of the state-of-the-art MOSFETs, memories, interconnection lines which will be analyzed from the point of view of materials, technologies and processes;
• the basic operating principles of devices beyond traditional planar CMOS, as FINFET, strained Silicon , etc. ;
• the study and comparison of the main technologies used in solar cell productions.
A second goal is to provide students the knowledge of some technological applications at system level:
• to capture energy from the environment and to transform it into electrical energy (Energy Harvesting);
• to generate, transmit and store energy in the Smart-grids;
with special attention to the way energy is produced and stored and to the related issues.
2. APPLYING KNOWLEDGE AND UNDERSTANDING. The student will learn to use a CAD tool for the design of electronic component at device level. In particular the student will be able to use the acquired knowledge and abilities:
• to model and simulate the thermal and/or electrical and/or optical behavior of an electronic device;
• to analyze the impact of different factors as the geometry, doping, material choice etc. on the final performance of the electronic device;
• to define the design requirements to obtain the better performance for a specific electronic device.
Prerequisites
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Course unit content
I) Silicon planar process: the different steps of silicon planar process are analyzed showing the main technological constraints and the improvement capabilities; some important processes are studied in detail (i.e. CMOS process).
II) The scaling, integration and time to market concepts in semiconductor industry are presented starting from ITRS (International Technology Roadmap for Semiconductors), with special attention to MOSFET devices, semiconductor memories, and interconnection lines which are analyzed from the point of view of materials, technologies, process techniques and new structures.
III) Photovoltaic modules: some of the main photovoltaic technologies are analyzed, and special emphasis is given to silicon and thin film solar cells.
IV) Smart-grid: working definitions and fundamental components of the distributed generation and storage of energy in the "smart" electrical grid are introduced.
V) Some of the main techniques, technologies and applications of energy harvesting are presented.
VI) Advanced CAD tools to analyze and design some of the described devices are used (i.e. modelling of solar cells).
Full programme
I) Silicon planar process:
Silicon wafer production;
Thermal Oxidation;
Lithography;
Doping techniques: diffusion and ion implantation;
Epitaxial Deposition;
Deposition technique of dielectric and conductor materials ;
Etching;
Packaging.
II) Scaling, integration and time to market:
Ideal and real scaling: definition, limits and comparison;
Short channel effect: technological and architectural solutions.
Technological processes: NMOSFET, CMOS, BJT, SOI MOSFETs.
III) Solar cells:
Crystalline and amorphous silicon-based solar cells and modules;
Thin film solar cells: CIGS and CdTe based solar cells.
III-V multi-junctions solar cells
IV) Energy harvesting: from vibration, solar energy, piezoelectricity.
V) Smart-grids: working definitions, fundamental components, renewable energy sources integration, energy storage.
VI) Analysis and design of electronic devices with the Synopsys-Sentaurus tcad tool.
Bibliography
1) S.M.Sze, "ULSI technology", Mcgraw hill, 1996
2) S.M.Sze, "VLSI technology", McGraw-Hill Book Co., 1983
3) G. Soncini, "Tecnologie microelettroniche", Boringhieri, 1986.
4) T. J. Kazmierski, S. Beeby, “Energy Harvesting Systems”, Springer, 2011.
5) J. Momoh, “Smart Grid: fundamentals of design and analysis”, Wiley, 2012.
Teaching methods
The course is organized in traditional classroom lessons based on the topic listed in the course program section. Exercises on the sizing of the main technological processes introduced during the theoretical part of the course will be done by the teacher. A CAD tool for the analysis of the thermal and/or electrical and/or optical analysis of an electronic device will be used in the parallel laboratory activity.
Assessment methods and criteria
The exam is oral and will verify the knowledge and understanding of the topics presented during the course: the student will show to have understood the main techniques and technological issues related to the production of electronic devices, as well as their usage into electronic systems. A brief report (max 10 pages) about the laboratory project assigned by the teacher is also required: this activity can be done by the single student or by a little group of students (max 3), as decided by the students themselves. The relation will contain a critical analysis of the obtained results.
Other information
Slides on the topic of the course and prepared by the teacher are available for the students. The download of the slides from lea.unipr.it is allowed for registered students.
