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University of Parma
Course catalogue
Università degli Studi di Parma
course catalogue

MICROELECTRONIC TECHNOLOGY
cod. 14713

Academic year 2007/08
2° year of course - First semester
Professor
Giovanna SOZZI
Academic discipline
Elettronica (ING-INF/01)
Field
Ambito aggregato per crediti di sede
Type of training activity
Hub-specific activity
45 hours
of face-to-face activities
5 credits
hub:
course unit
in - - -
lectures timetable unavailable
exam calls
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Learning objectives

The course provides the main notions about the manufacturing technologies for VLSI integrated circuits.

Prerequisites

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Course unit content

<br />Preparation of Silicon wafers.<br />Generalities about planar silicon processing.<br />Photolithography.<br />Oxidation.<br />Doping by diffusion or by ion implantation.<br />Chemical vapor deposition, epitaxial growth.<br />Wet and dry etching.<br />Interconnects and metallizations.<br />Packaging problems.

Full programme

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Bibliography

S.M. SZE: ' VLSI Technology ', McGraw-Hill, 1988<br />G. SONCINI: ' Tecnologie Microelettroniche ', Boringhieri, 1986

Teaching methods

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Assessment methods and criteria

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Other information

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2030 agenda goals for sustainable development

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