Learning objectives
<br />Basic knoweledge of the main tecniques and processes used in thepreparation of microelectronic devices
Prerequisites
<br />Knowledge of thefundamental properties of semiconductor materials
Course unit content
<br /> Introductionon the properties of semiconductor materials. Doping of the semiconductormaterials. Diffusion mechanisms of dopant impurities. Implantation technique.Rapid thermal annealings.<br />Short accounts on the properties of the p/n junction and ofsemiconductor surfaces. Metal/semiconductor contacts. Ohmic and rectifyingcontacts. Resistivity and mobility measurement techniques.<br /> <br /> Growth of bulksingle crystal by Czochralski method. Visit to the bulk growth laboratory(IMEM-Institute).<br />Epitaxial growth techniques: Vapour Phase Epitaxy (VPE, MOVPE),Molecular Beam Epitaxy (MBE). Visit to the epitaxial growth laboratories(IMEM-Institute).<br /> Opticallithography. Lithographic processes (resist deposition, exposure,developement). X-ray and Electronic Beam lithography.<br />Process steps for preparation of metal/semiconductor diodes andp/n junctions. Oxidation processes.<br /> Realization(through evaporations and photolithography) of Schottky barriers on GaAs andSi, control of the ohmic contact quality and measurements of thecurrent-voltage characteristics (IMEM-Institute, Electrical measurementlaboratory).<br /> Wet and dry etchings. Plasmaetching, sputter etching and reactive ion etching. Etching tests onsemiconductor materials (IMEM-Institute, photolithography laboratory).Realization of a p/n junction with “mesa” structure.<br /> Metal deposition by thermal andelectron beam evaporation. (IMEM-Institute, photolithography laboratory).<br />Capacitance vsvoltage measurements of Schottky barriers and p/n junctions.
Full programme
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Bibliography
<br />Lecture notes<br />G. Soncini,“Tecnologie microelettroniche”, Boringhieri<br />CRM Grovenor,“Microelectronic materials”, Adam Hiler<br />P. Blood and WOrton, “The electrical characterization of semiconductor: majority vcarriersand electron states, Academic Press 1992
Teaching methods
Oral lesson and laboratory
Assessment methods and criteria
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Other information
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